Multi-modal tabletop EUV reflectometry for characterization of nanostructures Conference Proceeding

Overview

CU Boulder Authors

publication date

February 27, 2023

has restriction

closed

Date in CU Experts

July 27, 2023 4:10 AM

Full Author List

Esashi Y; Jenkins NW; Tanksalvala M; Shao Y; McBennett B; Knobloch JL; Kapteyn HC; Murnane MM

Full Editor List

Robinson JC; Sendelbach MJ

author count

8

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control XXXVII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2658543

International Standard Book Number (ISBN) 13

978-1-5106-6099-1

Additional Document Info

volume

12496