Thermal Atomic Layer Etching of Zinc Sulfide Using Sequential Trimethylaluminum and Hydrogen Fluoride Exposures: Evidence for a Conversion Mechanism Journal Article
Overview
publication date
- August 16, 2023
has restriction
- closed
Date in CU Experts
- August 30, 2023 12:36 PM
Full Author List
- Nam T; Partridge JL; George SM
author count
- 3
citation count
- 1
published in
- Chemistry of Materials Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0897-4756
Electronic International Standard Serial Number (EISSN)
- 1520-5002
Digital Object Identifier (DOI)
Additional Document Info
start page
- 6671
end page
- 6681
volume
- 35
issue
- 17