Thermal Atomic Layer Etching of Zinc Sulfide Using Sequential Trimethylaluminum and Hydrogen Fluoride Exposures: Evidence for a Conversion Mechanism Journal Article uri icon

Overview

publication date

  • August 16, 2023

has restriction

  • closed

Date in CU Experts

  • August 30, 2023 12:36 PM

Full Author List

  • Nam T; Partridge JL; George SM

author count

  • 3

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 6671

end page

  • 6681

volume

  • 35

issue

  • 17