Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging Journal Article

Overview

CU Boulder Authors

publication date

December 1, 2023

has restriction

closed

Date in CU Experts

December 26, 2023 9:27 AM

Full Author List

Esashi Y; Jenkins NW; Shao Y; Shaw JM; Park S; Murnane MM; Kapteyn HC; Tanksalvala M

author count

8

citation count

0

published in

Review of Scientific Instruments Journal

Other Profiles

International Standard Serial Number (ISSN)

0034-6748

Electronic International Standard Serial Number (EISSN)

1089-7623

Digital Object Identifier (DOI)

https://doi.org/10.1063/5.0175860

Additional Document Info

volume

94

issue

12

number

ARTN 123705