Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions Journal Article uri icon

Overview

publication date

  • January 29, 2024

has restriction

  • closed

Date in CU Experts

  • February 28, 2024 8:33 AM

Full Author List

  • Nam T; Colleran TA; Partridge JL; Cavanagh AS; George SM

author count

  • 5

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 1449

end page

  • 1458

volume

  • 36

issue

  • 3