Investigation of the resist outgassing and hydrocarbonaceous contamination induced in multi electron beams lithography tools Conference Proceeding uri icon


publication date

  • February 24, 2014

has restriction

  • closed

Date in CU Experts

  • May 22, 2024 8:44 AM

Full Author List

  • Mebiene-Engohang A-P; Pourteau ML; Marusic JC; Pain L; Nakayama T; Miyake A; Smits M; David S; Labau S; Boussey J

Full Editor List

  • Resnick DJ; Bencher C

author count

  • 10

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info


  • 9049