Investigation of the resist outgassing and hydrocarbonaceous contamination induced in multi electron beams lithography tools Conference Proceeding

Overview

CU Boulder Authors

Miyake, Akira

publication date

February 24, 2014

has restriction

closed

Date in CU Experts

May 22, 2024 8:44 AM

Full Author List

Mebiene-Engohang A-P; Pourteau ML; Marusic JC; Pain L; Nakayama T; Miyake A; Smits M; David S; Labau S; Boussey J

Full Editor List

Resnick DJ; Bencher C

author count

10

published in

Proceedings of SPIE Journal

presented at event

Conference on Alternative Lithographic Technologies VI Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2046350

Additional Document Info

volume

9049