Phase measurement of reflection of EUV multilayer mirror using EUV standing waves Conference Proceeding

Overview

CU Boulder Authors

Miyake, Akira

publication date

June 1, 2004

has restriction

closed

Date in CU Experts

May 22, 2024 8:44 AM

Full Author List

Miyake A; Amemiya M; Masaki F; Watanabe Y

author count

4

published in

Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics Journal

presented at event

48th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication Conference

Other Profiles

International Standard Serial Number (ISSN)

1071-1023

Digital Object Identifier (DOI)

https://doi.org/10.1116/1.1815302

Additional Document Info

start page

2970

end page

2974

volume

22

issue

6