LPP-based reflectometer for characterization of EUV lithography systems Conference Proceeding uri icon

Overview

publication date

  • February 25, 2003

has restriction

  • closed

Date in CU Experts

  • May 22, 2024 8:44 AM

Full Author List

  • Miyake A; Miyachi T; Amemiya M; Hasegawa T; Ogushi N; Yamamoto T; Masaki F; Watanabe Y

Full Editor List

  • Engelstad RL

author count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

International Standard Book Number (ISBN) 10

  • 0-8194-4842-7

Additional Document Info

start page

  • 647

end page

  • 655

volume

  • 5037