Thermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition Journal Article uri icon

Overview

publication date

  • May 13, 2024

has restriction

  • closed

Date in CU Experts

  • June 5, 2024 8:51 AM

Full Author List

  • Partridge JL; Murdzek JA; Johnson VL; Cavanagh AS; Sharma S; George SM

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 5149

end page

  • 5159

volume

  • 36

issue

  • 10