Prevention and characterization of thin film defects induced by contaminant aggregates in initiated chemical vapor deposition Journal Article uri icon

Overview

publication date

  • April 14, 2024

has restriction

  • bronze

Date in CU Experts

  • January 10, 2025 9:45 AM

Full Author List

  • Shindler S; Franklin T; Yang R

author count

  • 3

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-9606

Electronic International Standard Serial Number (EISSN)

  • 1089-7690

Additional Document Info

volume

  • 160

issue

  • 14

number

  • ARTN 144904