Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanoscale Metrology Conference Proceeding

Overview

abstract

We present a unique instrument, designed to characterize the composition, geometry, topography, and interface quality of 2D heterostructures. We demonstrate three modes of characterizations, including reflectometry, scatterometry, and coherent diffractive imaging reflectometry.

CU Boulder Authors

publication date

January 1, 2024

Date in CU Experts

February 9, 2025 12:28 PM

Full Author List

Shao Y; Jenkins NW; Klein C; Li Y; Esashi Y; Tanksalvala M; Murnane MM; Kapteyn HC

author count

8

presented at event

Frontiers in Optics Conference

Other Profiles

Digital Object Identifier (DOI)

https://doi.org/10.1364/fio.2024.ftu1b.3

Additional Document Info

start page

FTu1B.3

end page

FTu1B.3