Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology Conference Proceeding uri icon

Overview

publication date

  • May 20, 2024

Date in CU Experts

  • February 9, 2025 12:45 PM

Full Author List

  • Shao Y; Jenkins NW; Klein C; Li Y; Esashi Y; Murnane MM; Kapteyn HC; Tanksalvala M

author count

  • 8

Other Profiles

Additional Document Info

start page

  • 1

end page

  • 5