MULTI-MODAL EXTREME-ULTRAVIOLET REFLECTOMETER: SOLVING INVERSE PROBLEMS IN NANOSTRUCTURE METROLOGY Conference Proceeding uri icon

Overview

publication date

  • May 20, 2024

has restriction

  • closed

Date in CU Experts

  • February 9, 2025 12:45 PM

Full Author List

  • Shao Y; Jenkins NW; Klein C; Li Y; Esashi Y; Murnane MM; Kapteyn HC; Tanksalvala M

author count

  • 8

citation count

  • 0

Other Profiles

International Standard Book Number (ISBN) 13

  • 979-8-3503-0865-5