Plasma-assisted chemical vapour deposition with titanium amides as precursors Journal Article uri icon

Overview

publication date

  • May 1, 1991

Date in CU Experts

  • May 6, 2026 4:02 AM

Full Author List

  • Stock H-R; Berndt H; Mayr P

author count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0257-8972

Additional Document Info

start page

  • 15

end page

  • 23

volume

  • 46

issue

  • 1