publication venue for
- Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition 2011
- Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry 2007
- YSZ layers by pulsed-MOCVD on solid oxide fuel cell electrodes 2003
- Growth rate and morphology for ceramic films by pulsed-MOCVD 2001