keywords 0306 Physical Chemistry (incl. Structural), 0912 Materials Engineering, 0204 Condensed Matter Physics
publication venue for Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition 2011 Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry 2007 YSZ layers by pulsed-MOCVD on solid oxide fuel cell electrodes 2003 Growth rate and morphology for ceramic films by pulsed-MOCVD 2001