Thermal Atomic Layer Etching of Indium Gallium Zinc Oxide (IGZO), In₂O₃, Ga₂O₃, and ZnO Using Sequential Hydrogen Fluoride and Acetylacetone Exposures Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

November 13, 2025

Date in CU Experts

July 2, 2026 1:15 AM

Full Author List

Colleran TA; Abdulagatov AI; Partridge JL; Cavanagh AS; George SM

author count

5

citation count

2

published in

Journal of Physical Chemistry C Journal

Other Profiles

International Standard Serial Number (ISSN)

1932-7447

Electronic International Standard Serial Number (EISSN)

1932-7455

Digital Object Identifier (DOI)

https://doi.org/10.1021/acs.jpcc.5c05730

Additional Document Info

start page

20223

end page

20233

volume

129

issue

45