Electron-Enhanced Atomic Layer Deposition of Tunable TiC x N y Ternary Nitride Films Using Tetrakis(dimethylamido)titanium with Ammonia Reactive Background Gas Journal Article uri icon

Overview

publication date

  • April 28, 2026

Date in CU Experts

  • July 2, 2026 2:08 AM

Full Author List

  • Sobell ZC; Cavanagh AS; George SM

author count

  • 3

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 4104

end page

  • 4114

volume

  • 38

issue

  • 8