Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography Journal Article uri icon

Overview

publication date

  • January 18, 2011

Full Author List

  • Ro HW; Popova V; Chen L; Forster AM; Ding Y; Alvine KJ; Krug DJ; Laine RM; Soles CL

Other Profiles

Additional Document Info

start page

  • 414

end page

  • 420

volume

  • 23

issue

  • 3