Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor Journal Article uri icon

Overview

publication date

  • November 1, 2003

Full Author List

  • Wijesundara MBJ; Gao D; Carraro C; Howe RT; Maboudian R

Other Profiles

Additional Document Info

start page

  • 18

end page

  • 25

volume

  • 259

issue

  • 1-2