A low-temperature CVD process for silicon carbide MEMS Journal Article uri icon

Overview

publication date

  • April 1, 2002

Full Author List

  • Stoldt CR; Carraro C; Ashurst WR; Gao D; Howe RT; Maboudian R

Other Profiles

Additional Document Info

start page

  • 410

end page

  • 415

volume

  • 97-98