A low-temperature CVD process for silicon carbide MEMS Journal Article uri icon

Overview

publication date

  • April 1, 2002

Date in CU Experts

  • January 15, 2014 10:43 AM

Full Author List

  • Stoldt CR; Carraro C; Ashurst WR; Gao D; Howe RT; Maboudian R

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 410

end page

  • 415

volume

  • 97-98