A low-temperature CVD process for silicon carbide MEMS Journal Article

Overview

CU Boulder Authors

• Stoldt, Conrad Robert

publication date

• April 1, 2002

has restriction

• bronze

Date in CU Experts

• January 15, 2014 10:43 AM

Full Author List

• Stoldt CR; Carraro C; Ashurst WR; Gao D; Howe RT; Maboudian R

author count

• 6

published in

• Sensors and Actuators A: Physical  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0924-4247

Digital Object Identifier (DOI)

• https://doi.org/10.1016/s0924-4247(01)00810-x

Additional Document Info

start page

• 410

end page

• 415

volume

• 97-98