ADSORPTION AND DESORPTION-KINETICS FOR CHLOROSILANES ON SI(111)7X7 Chapter uri icon

Overview

publication date

  • January 1, 1991

Full Author List

  • GUPTA P; COON PA; KOEHLER BG; WISE ML; GEORGE SM

Additional Document Info

start page

  • 311

end page

  • 317

volume

  • 204