DIETHYLSILANE DECOMPOSITION ON SILICON SURFACES STUDIED USING TRANSMISSION FTIR SPECTROSCOPY Journal Article uri icon

Overview

publication date

  • February 1, 1992

Full Author List

  • DILLON AC; ROBINSON MB; HAN MY; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 537

end page

  • 543

volume

  • 139

issue

  • 2