DIETHYLSILANE DECOMPOSITION ON SILICON SURFACES STUDIED USING TRANSMISSION FTIR SPECTROSCOPY Journal Article uri icon

Overview

publication date

  • February 1, 1992

has restriction

  • closed

Date in CU Experts

  • February 3, 2014 12:05 PM

Full Author List

  • DILLON AC; ROBINSON MB; HAN MY; GEORGE SM

author count

  • 4

citation count

  • 74

Other Profiles

International Standard Serial Number (ISSN)

  • 0013-4651

Additional Document Info

start page

  • 537

end page

  • 543

volume

  • 139

issue

  • 2