DIETHYLSILANE ON SILICON SURFACES - ADSORPTION AND DECOMPOSITION KINETICS Journal Article uri icon

Overview

publication date

  • January 1, 1992

Full Author List

  • COON PA; WISE ML; DILLON AC; ROBINSON MB; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 221

end page

  • 227

volume

  • 10

issue

  • 1