COMPARISON OF TRICHLOROSILANE AND TRICHLOROGERMANE DECOMPOSITION OF SILICON SURFACES USING FTIR SPECTROSCOPY
Chapter
Overview
publication date
- January 1, 1993
Date in CU Experts
- February 3, 2014 12:23 PM
Full Author List
- DILLON AC; ROBINSON MB; GEORGE SM
Full Editor List
- Abernathy CR; Bates CW; Bohling DA; Hobson WS
author count
- 3
citation count
- 2
Other Profiles
International Standard Book Number (ISBN) 10
- 1-55899-177-8
Additional Document Info
start page
- 405
end page
- 411
volume
- 282