COMPARISON OF TRICHLOROSILANE AND TRICHLOROGERMANE DECOMPOSITION OF SILICON SURFACES USING FTIR SPECTROSCOPY Chapter uri icon

Overview

publication date

  • January 1, 1993

Full Author List

  • DILLON AC; ROBINSON MB; GEORGE SM

Additional Document Info

start page

  • 405

end page

  • 411

volume

  • 282