GERMANIUM DEPOSITION ON SILICON - SURFACE-CHEMISTRY OF (CH3CH2)2GEH2 AND GECL4 Chapter uri icon

Overview

publication date

  • January 1, 1993

Full Author List

  • COON PA; WISE ML; DILLON AC; GEORGE SM

Additional Document Info

start page

  • 413

end page

  • 419

volume

  • 282