SiO2 Growth on Si(111) 7x7 Using SiCl4 and H2O Chapter uri icon

Overview

abstract

  • The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

publication date

  • March 23, 1993

Full Author List

  • GEORGE S

book title

  • Chemical Perspectives of Microelectronic Materials III:

Other Profiles

International Standard Book Number (ISBN) 13

  • 9781558991774