SiO2 Growth on Si(111) 7x7 Using SiCl4 and H2O Chapter

Overview

abstract

• The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

CU Boulder Authors

• George, Steven

publication date

• March 23, 1993

Full Author List

• GEORGE S

book title

• Chemical Perspectives of Microelectronic Materials III:

Other Profiles

International Standard Book Number (ISBN) 13

• 9781558991774