DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON Chapter

Overview

CU Boulder Authors

George, Steven

publication date

January 1, 1994

Full Author List

WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM

published in

MRS Online Proceedings Library Journal

Additional Document Info

start page

37

end page

43

volume

334