DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON Chapter

Overview

CU Boulder Authors

• George, Steven

publication date

• January 1, 1994

Date in CU Experts

• February 3, 2014 12:28 PM

Full Author List

• WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM

Full Editor List

• Mountziaris TJ; PazPujalt GR; Smith FTJ; Westmoreland PR

author count

• 5

published in

• MRS Online Proceedings Library  Journal

Other Profiles

International Standard Book Number (ISBN) 10

• 1-55899-233-2

Additional Document Info

start page

• 37

end page

• 43

volume

• 334