DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON Chapter uri icon

Overview

publication date

  • January 1, 1994

Date in CU Experts

  • February 3, 2014 12:28 PM

Full Author List

  • WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM

Full Editor List

  • Mountziaris TJ; PazPujalt GR; Smith FTJ; Westmoreland PR

author count

  • 5

citation count

  • 0

Other Profiles

International Standard Book Number (ISBN) 10

  • 1-55899-233-2

Additional Document Info

start page

  • 37

end page

  • 43

volume

  • 334