DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON Chapter uri icon

Overview

publication date

  • January 1, 1994

Full Author List

  • WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM

Additional Document Info

start page

  • 37

end page

  • 43

volume

  • 334