DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON
Chapter
Overview
publication date
- January 1, 1994
Full Author List
- WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM
published in
- MRS Online Proceedings Library Journal
Additional Document Info
start page
- 37
end page
- 43
volume
- 334