DIETHYLDIETHOXYSILANE AS A NEW PRECURSOR FOR SIO2 GROWTH ON SILICON
Chapter
Overview
publication date
- January 1, 1994
Date in CU Experts
- February 3, 2014 12:28 PM
Full Author List
- WISE ML; SNEH O; OKADA LA; DILLON AC; GEORGE SM
Full Editor List
- Mountziaris TJ; PazPujalt GR; Smith FTJ; Westmoreland PR
author count
- 5
published in
- MRS Online Proceedings Library Journal
Other Profiles
International Standard Book Number (ISBN) 10
- 1-55899-233-2
Additional Document Info
start page
- 37
end page
- 43
volume
- 334