ATOMIC LAYER GROWTH OF SIO2 ON SI(100) USING THE SEQUENTIAL DEPOSITION OF SICL4 AND H2O Chapter uri icon

Overview

publication date

  • January 1, 1994

Full Author List

  • SNEH O; WISE ML; OKADA LA; OTT AW; GEORGE SM

Additional Document Info

start page

  • 25

end page

  • 30

volume

  • 334