ATOMIC LAYER GROWTH OF SIO2 ON SI(100) USING THE SEQUENTIAL DEPOSITION OF SICL4 AND H2O Chapter uri icon

Overview

publication date

  • January 1, 1994

Date in CU Experts

  • February 3, 2014 12:29 PM

Full Author List

  • SNEH O; WISE ML; OKADA LA; OTT AW; GEORGE SM

Full Editor List

  • Mountziaris TJ; PazPujalt GR; Smith FTJ; Westmoreland PR

author count

  • 5

citation count

  • 1

Other Profiles

International Standard Book Number (ISBN) 10

  • 1-55899-233-2

Additional Document Info

start page

  • 25

end page

  • 30

volume

  • 334