ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS EMPLOYING TRIMETHYLALUMINUM (TMA) AND H2O VAPOR Chapter

Overview

CU Boulder Authors

George, Steven

publication date

January 1, 1994

Full Author List

DILLON AC; OTT AW; GEORGE SM; WAY JD

published in

MRS Online Proceedings Library Journal

Additional Document Info

start page

335

end page

340

volume

335