ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS EMPLOYING TRIMETHYLALUMINUM (TMA) AND H2O VAPOR
Chapter
Overview
publication date
- January 1, 1994
Full Author List
- DILLON AC; OTT AW; GEORGE SM; WAY JD
published in
- MRS Online Proceedings Library Journal
Additional Document Info
start page
- 335
end page
- 340
volume
- 335