ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS EMPLOYING TRIMETHYLALUMINUM (TMA) AND H2O VAPOR Chapter uri icon

Overview

publication date

  • January 1, 1994

Full Author List

  • DILLON AC; OTT AW; GEORGE SM; WAY JD

Additional Document Info

start page

  • 335

end page

  • 340

volume

  • 335