ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS EMPLOYING TRIMETHYLALUMINUM (TMA) AND H2O VAPOR Chapter uri icon

Overview

publication date

  • January 1, 1994

Date in CU Experts

  • February 3, 2014 12:31 PM

Full Author List

  • DILLON AC; OTT AW; GEORGE SM; WAY JD

Full Editor List

  • Desu SB; Beach DB; Wessels BW; Gokoglu S

author count

  • 4

citation count

  • 2

Other Profiles

International Standard Book Number (ISBN) 10

  • 1-55899-234-0

Additional Document Info

start page

  • 335

end page

  • 340

volume

  • 335