High-k Dielectrics Grown by Atomic Layer Deposition: Capacitor and Gate Applications Chapter uri icon

Overview

abstract

  • Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges.

publication date

  • October 13, 2003

Full Author List

  • GEORGE S

book title

  • Interlayer Dielectrics for Semiconductor Technologies

Other Profiles

International Standard Book Number (ISBN) 13

  • 9780080521954