Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source
Chapter
Overview
publication date
- January 1, 2010
has restriction
- closed
Date in CU Experts
- February 3, 2014 2:06 AM
Full Author List
- Cavanagh AS; Lee Y; Yoon B; George SM
Full Editor List
- Elam JW; DeGendt S; VanDerStraten O; Delabie A; Londergan A; Bent SF; Roozeboom F
author count
- 4
citation count
- 52
published in
- ECS Transactions Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 223
end page
- 229
volume
- 33