Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source Chapter uri icon

Overview

publication date

  • January 1, 2010

Full Author List

  • Cavanagh AS; Lee Y; Yoon B; George SM

Other Profiles

Additional Document Info

start page

  • 223

end page

  • 229

volume

  • 33