Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source Chapter uri icon

Overview

publication date

  • January 1, 2010

has restriction

  • closed

Date in CU Experts

  • February 3, 2014 2:06 AM

Full Author List

  • Cavanagh AS; Lee Y; Yoon B; George SM

Full Editor List

  • Elam JW; DeGendt S; VanDerStraten O; Delabie A; Londergan A; Bent SF; Roozeboom F

author count

  • 4

citation count

  • 48

Other Profiles

Additional Document Info

start page

  • 223

end page

  • 229

volume

  • 33