Large-area oxidation of AlAs layers for dielectric stacks and thick buried oxides Journal Article uri icon

Overview

publication date

  • July 1, 2004

Full Author List

  • Tandon SN; Gopinath JT; Erchak AA; Petrich GS; Kolodziejski LA; Ippen EP

Other Profiles

Additional Document Info

start page

  • 774

end page

  • 779

volume

  • 33

issue

  • 7