Large-area oxidation of AlAs layers for dielectric stacks and thick buried oxides Journal Article uri icon

Overview

publication date

  • July 1, 2004

has restriction

  • closed

Date in CU Experts

  • April 6, 2014 8:20 AM

Full Author List

  • Tandon SN; Gopinath JT; Erchak AA; Petrich GS; Kolodziejski LA; Ippen EP

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0361-5235

Electronic International Standard Serial Number (EISSN)

  • 1543-186X

Additional Document Info

start page

  • 774

end page

  • 779

volume

  • 33

issue

  • 7