Defect visualization of atomic layer deposition enabled polymer barriers using fluorescent tags Conference Proceeding uri icon

Overview

publication date

  • May 18, 2008

Full Author List

  • Zhang Y; Miller DC; Bertrand JA; Jen S-H; Yang R; Dunn ML; George SM; Lee YC; Zhang Y-Z

Other Profiles

Additional Document Info

start page

  • 143

end page

  • 146

volume

  • 39