Digitally positioned micromirror for open-loop controlled applications Conference Proceeding

Overview

CU Boulder Authors

publication date

January 20, 2002

Full Author List

Zhang JL; Lee YC; Bright VM; Neff J

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMSYS.2002.984327

Additional Document Info

start page

536

end page

539