Atomic layer deposition (ALD) technology for reliable RF MEMS Conference Proceeding

Overview

CU Boulder Authors

• Bright, Victor Mark
• George, Steven
• Lee, Y. C.

publication date

• June 2, 2002

Full Author List

• Hoivik N; Elam JW; George SM; Gupta KC; Bright VM; Lee YC

published in

• IEEE Mtt S International Microwave Symposium Digest  Journal

Other Profiles

Digital Object Identifier (DOI)

• 10.1109/MWSYM.2002.1011881

Additional Document Info

start page

• 1229

end page

• 1232