Atomic layer deposition (ALD) technology for reliable RF MEMS Conference Proceeding

Overview

CU Boulder Authors

• Bright, Victor Mark
• George, Steven

publication date

• June 2, 2002

Date in CU Experts

• May 28, 2014 4:03 AM

Full Author List

• Hoivik N; Elam JW; George SM; Gupta KC; Bright VM; Lee YC

Full Editor List

• Hamilton R

author count

• 6

citation count

• 16

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

presented at event

• IEEE MTT-S International Microwave Symposium  Conference

Other Profiles

International Standard Serial Number (ISSN)

• 0149-645X

Electronic International Standard Serial Number (EISSN)

• 2576-7216

Digital Object Identifier (DOI)

• 10.1109/MWSYM.2002.1011881

International Standard Book Number (ISBN) 10

• 0-7803-7239-5

Additional Document Info

start page

• 1229

end page

• 1232