Atomic layer deposition (ALD) technology for reliable RF MEMS Conference Proceeding uri icon

Overview

publication date

  • June 2, 2002

Date in CU Experts

  • May 28, 2014 4:03 AM

Full Author List

  • Hoivik N; Elam JW; George SM; Gupta KC; Bright VM; Lee YC

Full Editor List

  • Hamilton R

author count

  • 6

citation count

  • 16

Other Profiles

International Standard Serial Number (ISSN)

  • 0149-645X

Electronic International Standard Serial Number (EISSN)

  • 2576-7216

International Standard Book Number (ISBN) 10

  • 0-7803-7239-5

Additional Document Info

start page

  • 1229

end page

  • 1232