Atomic layer deposition (ALD) technology for reliable RF MEMS
Conference Proceeding
Overview
publication date
- June 2, 2002
Full Author List
- Hoivik N; Elam JW; George SM; Gupta KC; Bright VM; Lee YC
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1229
end page
- 1232