A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes
Conference Proceeding
Overview
publication date
- August 23, 2004
Full Author List
- Liu LL; Mukdadi OM; Herrmann CF; Saravanan RA; Hertzberg JR; George SM; Bright VM; Shandas R
published in
Additional Document Info
start page
- 497
end page
- 500