A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes Conference Proceeding uri icon

Overview

publication date

  • August 23, 2004

Date in CU Experts

  • May 28, 2014 4:05 AM

Full Author List

  • Liu LL; Mukdadi OM; Herrmann CF; Saravanan RA; Hertzberg JR; George SM; Bright VM; Shandas R

Full Editor List

  • Yuhas MP

author count

  • 8

citation count

  • 7

Other Profiles

International Standard Serial Number (ISSN)

  • 1051-0117

International Standard Book Number (ISBN) 10

  • 0-7803-8413-X

Additional Document Info

start page

  • 497

end page

  • 500