A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes Conference Proceeding uri icon

Overview

publication date

  • August 23, 2004

Full Author List

  • Liu LL; Mukdadi OM; Herrmann CF; Saravanan RA; Hertzberg JR; George SM; Bright VM; Shandas R

Additional Document Info

start page

  • 497

end page

  • 500