A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes Conference Proceeding

Overview

CU Boulder Authors

publication date

August 23, 2004

Full Author List

Liu LL; Mukdadi OM; Herrmann CF; Saravanan RA; Hertzberg JR; George SM; Bright VM; Shandas R

published in

Ultrasonics Symposium Journal

Additional Document Info

start page

497

end page

500