Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54 A wavelength Conference Proceeding uri icon

Overview

publication date

  • January 25, 2005

Full Author List

  • Tripp MK; Fabreguette F; Herrmann CF; George SM; Bright VM

Other Profiles

Additional Document Info

start page

  • 241

end page

  • 251

volume

  • 5720