In Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry Conference Proceeding uri icon

Overview

publication date

  • October 27, 2013

Date in CU Experts

  • May 28, 2014 4:05 AM

Full Author List

  • Cavanagh AS; Baker L; Clancey JW; Yin J; Kongkanand A; Wagner FT; George SM

Full Editor List

  • Roozeboom F; Delabie A; Londergan A; DeGendt S; Elam JW; VanDerStraten O

author count

  • 7

citation count

  • 5

Other Profiles

International Standard Serial Number (ISSN)

  • 1938-5862

International Standard Book Number (ISBN) 13

  • 978-1-62332-101-7

Additional Document Info

start page

  • 19

end page

  • 26

volume

  • 58

issue

  • 10