In Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry Conference Proceeding

Overview

CU Boulder Authors

publication date

October 27, 2013

has restriction

closed

Date in CU Experts

May 28, 2014 4:05 AM

Full Author List

Cavanagh AS; Baker L; Clancey JW; Yin J; Kongkanand A; Wagner FT; George SM

Full Editor List

Roozeboom F; Delabie A; Londergan A; DeGendt S; Elam JW; VanDerStraten O

author count

7

citation count

5

published in

ECS Transactions Journal

presented at event

9th International Symposium on Atomic Layer Deposition Applications held during the 224th Meeting of the Electrochemical-Society (ECS) Conference

Other Profiles

International Standard Serial Number (ISSN)

1938-5862

Digital Object Identifier (DOI)

https://doi.org/10.1149/05810.0019ecst

International Standard Book Number (ISBN) 13

978-1-62332-101-7

Additional Document Info

start page

19

end page

26

volume

58

issue

10