In Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry Conference Proceeding uri icon

Overview

publication date

  • October 27, 2013

Full Author List

  • Cavanagh AS; Baker L; Clancey JW; Yin J; Kongkanand A; Wagner FT; George SM

Other Profiles

International Standard Book Number (ISBN) 13

  • 978-1-62332-101-7

Additional Document Info

start page

  • 19

end page

  • 26

volume

  • 58

issue

  • 10