ALD ENABLED NICKEL MEMS SWITCHES FOR DIGITAL LOGIC Conference Proceeding uri icon

Overview

publication date

  • November 11, 2011

Full Author List

  • Hall HJ; Davidson BD; George SM; Bright VM

Other Profiles

International Standard Book Number (ISBN) 13

  • 978-0-7918-5497-6

Additional Document Info

start page

  • 253

end page

  • 261