Metalcone and Metalcone/Metal Oxide Alloys Grown Using Atomic & Molecular Layer Deposition Conference Proceeding

Overview

CU Boulder Authors

George, Steven

publication date

October 10, 2011

has restriction

closed

Date in CU Experts

May 28, 2014 4:05 AM

Full Author List

Lee BH; Anderson VR; George SM

Full Editor List

Elam JW; Londergan A; VanDerStraten O; Roozeboom F; DeGendt S; Bent SF; Delabie A

author count

3

citation count

22

published in

ECS Transactions Journal

presented at event

7th Symposium on Atomic Layer Deposition Applications/220th Meeting of the Electrochemical-Society (ECS) Conference

Other Profiles

International Standard Serial Number (ISSN)

1938-5862

Digital Object Identifier (DOI)

https://doi.org/10.1149/1.3633661

International Standard Book Number (ISBN) 13

978-1-56677-902-9

Additional Document Info

start page

131

end page

138

volume

41

issue

2