Properties of atomic layer deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS Conference Proceeding uri icon

Overview

publication date

  • January 25, 2005

Full Author List

  • Herrmann CF; DelRio FW; George SM; Bright VM

Other Profiles

Additional Document Info

start page

  • 159

end page

  • 166

volume

  • 5715