Silicon carbon-nitride ceramics - a high temperature semiconductor material for MEMS applications
Conference Proceeding
Overview
publication date
- September 4, 2002
Full Author List
- Saravanan RA; Liew LA; Bright VM; Raj R
published in
- Proceedings of SPIE Journal
Additional Document Info
start page
- 538
end page
- 542
volume
- 4931