THERMALLY ACTUATED I-SHAPED ELECTROMECHANICAL VHF RESONATORS Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 29, 2012

Full Author List

Hall HJ; Rahafrooz A; Brown JJ; Bright VM; Pourkamali S

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal