Atomic layer deposited alumina for micromachined resonators Conference Proceeding uri icon

Overview

publication date

  • January 13, 2008

Full Author List

  • Chang YJ; Cobry K; Bright VM

Other Profiles

International Standard Book Number (ISBN) 13

  • 978-1-4244-1792-6

Additional Document Info

start page

  • 387

end page

  • 390