A solder self-assembled large angular displacement torsional electrostatic micromirror Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 20, 2002

Full Author List

McCarthy B; Bright VM; Neff JA

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMSYS.2002.984318

Additional Document Info

start page

499

end page

502