Probing limits of acoustic nanometrology using coherent extreme ultraviolet light Conference Proceeding uri icon

Overview

publication date

  • February 25, 2013

Date in CU Experts

  • May 28, 2014 5:04 AM

Full Author List

  • Nardi D; Hoogeboom-Pot KM; Hernandez-Charpak JN; Tripp M; King SW; Anderson EH; Murnane MM; Kapteyn HC

Full Editor List

  • Starikov A; Cain JP

author count

  • 8

citation count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info

volume

  • 8681