Probing limits of acoustic nanometrology using coherent extreme ultraviolet light Conference Proceeding uri icon

Overview

publication date

  • February 25, 2013

Full Author List

  • Nardi D; Hoogeboom-Pot KM; Hernandez-Charpak JN; Tripp M; King SW; Anderson EH; Murnane MM; Kapteyn HC

Other Profiles

Additional Document Info

volume

  • 8681