Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source Conference Proceeding uri icon

Overview

publication date

  • February 13, 2012

Full Author List

  • Seaberg MD; Adams DE; Zhang B; Gardner DF; Murnane MM; Kapteyn HC

Other Profiles

Additional Document Info

volume

  • 8324