Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide Journal Article uri icon

Overview

publication date

  • June 18, 2014

Full Author List

  • Eigenfeld NT; Gray JM; Brown JJ; Skidmore GD; George SM; Bright VM

Other Profiles

Additional Document Info

start page

  • 3962

end page

  • 3967

volume

  • 26

issue

  • 23