Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide
Journal Article
Overview
publication date
- June 18, 2014
Full Author List
- Eigenfeld NT; Gray JM; Brown JJ; Skidmore GD; George SM; Bright VM
published in
- Advanced Materials Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 3962
end page
- 3967
volume
- 26
issue
- 23