Theoretical Modeling of ALD Processes Chapter uri icon

Overview

publication date

  • January 1, 2012

Date in CU Experts

  • July 16, 2014 1:07 AM

Full Author List

  • Musgrave CB

Full Editor List

  • Pinna N; Knez M

author count

  • 1

book title

  • ATOMIC LAYER DEPOSITION OF NANOSTRUCTURED MATERIALS

citation count

  • 6

Other Profiles

International Standard Book Number (ISBN) 13

  • 978-3-527-32797-3

Additional Document Info

start page

  • 3

end page

  • 21