Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection Conference Proceeding uri icon

Overview

publication date

  • February 24, 2014

Date in CU Experts

  • August 21, 2014 4:49 AM

Full Author List

  • Zhang B; Adams DE; Seaberg MD; Gardner DF; Shanblatt ER; Kapteyn H; Murnane M

Full Editor List

  • Cain JP; Sanchez MI

author count

  • 7

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info

volume

  • 9050