Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection Conference Proceeding

Overview

CU Boulder Authors

publication date

February 24, 2014

has restriction

closed

Date in CU Experts

August 21, 2014 4:49 AM

Full Author List

Zhang B; Adams DE; Seaberg MD; Gardner DF; Shanblatt ER; Kapteyn H; Murnane M

Full Editor List

Cain JP; Sanchez MI

author count

7

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2046526

Additional Document Info

volume

9050