Growth and Properties of Hafnicone and HfO2/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques Journal Article uri icon

Overview

publication date

  • October 8, 2014

Full Author List

  • Lee BH; Anderson VR; George SM

Other Profiles

Additional Document Info

start page

  • 16880

end page

  • 16887

volume

  • 6

issue

  • 19