Journal of Micromechanics and Microengineering Journal

Overview

publication venue for

• Improved design of highly efficient microsized lithium-ion batteries for stretchable electronics 2019
• Hemispherical micro-resonators from atomic layer deposition 2014
• Flat flexible polymer heat pipes 2013
• Thermal performance of a flat polymer heat pipe heat spreader under high acceleration 2012
• Galvanically coupled gold/silicon-on-insulator microstructures in hydrofluoric acid electrolytes: finite element simulation and morphological analysis of electrochemical corrosion 2010
Development of a flexure-based, force-sensing microgripper for micro-object manipulation 2010
A wafer-scale packaging structure with monolithic microwave integrated circuits and passives embedded in a silicon substrate for multichip modules for radio frequency applications 2009
The fabrication of through-wafer interconnects in silicon substrates for ultra-high-vacuum atom-optics cells 2008
Fabrication of beam structures with micro-scale cross-sections and meso-scale spans 2007
Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors 2005
Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique 2004
... more

Research

keywords

• 09 Engineering, 10 Technology